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Thermal control devices
—Ceramic Heater—

Semiconductor/DeviceEnergyIndustrial Product/Material

Ceramic heaters (for semiconductor fabrication equipment)

Ceramic heaters (for semiconductor fabrication equipment)

Sumitomo Electric offers heat control devices with excellent heat characteristics by combining its proprietary high-functional material technologies with process technologies (e.g. metallization, joining, sealing) and heat design technologies. These technologies are applied in the heaters for semiconductor fabrication equipment that achieves superior temperature uniformity and rapid heating and cooling characteristics.

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